CLEAN-ROOM PERUGIA


Technical Info


The Clean Room is an I.N.F.N. laboratory located in the Physics Department of the Perugia University. It consists of two adjacent sub units (A.B) connected through an automatic door. This configuration allows to operate the two units either independently (different temperature and umidity settings) or as a unique environment, depending on the specific needs.



CLEAN-ROOM A

CLEAN-ROOM B

Purity-Class: ISO 4 (FED 209D M 5,5) ISO 2 (FED 209D M 3,5)
Temp-Range: ± 1°C ± 1°C
Humidity-Range: ± 5% ± 5%
Laminar-Flow: M 3,5 n° 4-dim 120x60 cm M 3,5 n° 1-dim 200x60 cm



Clean-room equipment


PA 200

Ladder

Mitutoyo BHN506

Mitutoyo 776

Kapton test station

Camalot

Forno

Silicon Survey



Balance

Bonding Delvotec

Hood

Gantry

Kulicke Soffa

Microscopes

Vacuum sealing

Keithley Instruments

Ultrasonic Bath

Documents
General rules


Links Utili:

Last update: 3.feb.2010